1500 ℃ single-zone tube furnace adopts silicon carbide rod as heating element, providing a rated temperature of 1,400 ℃ and a maximum temperature of 1450 ℃. With Yudian electronic type temperature controller and S-type thermocouple,temperature control through 30 programmable segments with a temperature control precision of ±1 ℃ is realized. With a set of 316 L stainless steel open-quick flanges that adopt double-ring sealing technology, the equipment can be applied to various experiment environments such as CVD experiment, phosphor preparation, sintering and substrate coating in vacuum or atmosphere.